Geometrical parameters measurement of surface functionalized micromachined micro-cantilever using optical method
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: International Nano Letters
سال: 2012
ISSN: 2008-9295,2228-5326
DOI: 10.1186/2228-5326-2-25